PAS 135 : 2007 Terminology for nanofabrication

This document, put out by the British Standards Institution, provides a guide for the standardization of terminology and definitions used in or associated with the naming or describing of applications of nanotechnologies to the fabrication of components, devices, structures, or systems with nanoscale dimensions. This document is applicable to, though not limited to, fabrication tools and techniques for electrical, electronic, magnetic, mechanical, optical components, devices, structures, and systems, and for the fabrication of larger structures, components, devices, and systems from nanoscale elements. Free registration required to download.