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IEEE P1670 Chemical Vapor Deposition (CVD) Techniques for Nanotechnologies


By csep - Posted on 19 April 2010

TitleIEEE P1670 Chemical Vapor Deposition (CVD) Techniques for Nanotechnologies
Publication TypeStandards
Corporate AuthorsInstitute for Electrical and Electronics Engineers Standards Association
PublisherInstitute for Electrical and Electronics Engineers Standards Association
Year of PublicationIn Press
Publication LanguageEnglish
Abstract

This standard, still under development, will establish uniform recommendations and analyses needed in chemical vapor deposition nanoscale processing.

URLhttp://standards.ieee.org/announcements/pr_p1670.html
Citation Key116